Working on overall research and development of a vacuum reaction chamber for semiconductor processing equipment as per customer requirements:
- Designed and conducted experiments to validate heaters, thermal spacers, and new O-ring materials through chamber bench testing and establishing relevant specs.
- Conducted thermal validation tests on the wafer stage using a TC wafer which include surface temperature non-uniformity tests, transient and steady state tests to correlate wafer temperature and process result through a temperature spec
- Took part in design and development of the susceptor (stage on which the wafer sits during process) using an alternate manufacturing technique to improve its thermal performance and reduce manufacturing variation
- System level trouble shooting through data analysis to identify root cause for feild related issues and presenting to the management
- Taking part in various design reviews and proving feedback/suggestions for possible improvement
- Worked closely with production & manufacturing teams to resolve build/quality issues and improve documentation