Robert Mattison
Equipment Technician-Semiconductor
Ivanhoe,TX
Summary
Hardworking technician bringing 25+ years of experience performing diverse maintenance and repair duties. Dedicated to maintaining optimal equipment functionality by managing routine and complex equipment and facility matters. Strong knowledge of hand and power tool operation and safety measures.
Overview
32
32
years of professional experience
2
2
years of post-secondary education
Work History
Facilities and Maintenance Technician III
Reactive Technologies Epi
2 2022 - Current
- Perform preventive and corrective maintenance on ASM E2000 and E2 epitaxial reactors, also perform preventative and corrective maintenance on LPE 2061and 3061 epitaxial reactors
- Maintain and repair all supporting Metrology equipment and clean hoods
- Work with manufacturing and engineering groups to troubleshoot and resolve equipment and process issues
- Improve system performance to achieve process requirements and eliminate repetitive downs
- Monitor and analyze all related data to improve/maintain tool performance and address issues
- Maintain and repair all facilities support equipment, gas delivery systems, process cooling water, exhaust scrubbers, CDA system and air filtration systems into fab, plus any general building maintenance.
- Performed electrical and mechanical repairs of production equipment to minimize downtime.
- Reduced downtime by quickly diagnosing and resolving technical issues on machinery.
- Followed safety protocols to minimize workplace accidents.
- Minimized production delays, responding swiftly to emergency breakdowns or unexpected malfunctions.
- Troubleshot equipment breakdowns and performed preventive maintenance
- Followed work orders and specifications for machine and equipment replacement, repair, or maintenance
- Performed electrical and mechanical repairs of production equipment to minimize downtime
- Improved equipment functionality by conducting regular maintenance checks and repairs
Metrology Equipment Engineering Technician
Texas Instruments
11.2014 - 02.2022
- Support the metrology group with repair and troubleshooting of fab metrology equipment
- Coordinate with engineering and manufacturing to ensure maximum uptime on all metrology tool sets
- Tool sets include KLA SP1 pc tools, KLA RS100 resistivity mappers, KLA Stealth and Ait inspection tools, Asst 4300 and Spartan sorters, KLA Archer alignment tools, KLA SP2 pc tools, AMAT SEM vision Verity SEM inspection tools, KLA Puma inspect tools, KLA F5/Spectra thickness measurement tools, KLA Viper inspect tools, Optiprobe thickness measurement tools, all load ports associated with the tools
- Coordinate with AMHS group to ensure proper foup handling between the metro tools and the overhead track
- Participate in 5s audits and general 5s activities
- Work pc issues across all tools and general spcd downs
- Work basic automation issues.
- Supported quality control efforts by ensuring all equipment met compliance standards during routine inspections.
- Maximized productivity with preventative maintenance schedules that reduced unplanned outages and downtime.
Lead CMP STO Manufacturing Specialist
Texas Instruments
09.2001 - 11.2014
- Operate Applied Materials Mirra and Desica polishers
- Operate Novellus Momentum and Ipec 676 polishers
- Run product material to specification with an emphasis on high quality and low cycle time
- Qualified in all processes across the cmp areas of DMOS5 North and South
- These include oxide polish, tungsten polish, sti polish and copper polish operations
- Perform consumable changes and light maintenance on all tools in the cmp area
- Qualified to perform pad changes, head and disk changes on the AMAT tool sets and pad, carrier, bladder, and conditioner changes on the Novellus tool sets
- Coordinate all STO activity between north and south fabs adjusting sto personnel utilization to maintenance and process needs
- Rebuild carriers to ensure there are replacement assemblies in stock for Novellus pad changes
- Responsible for keeping the vidmars stocked with replacement consumable parts such as pads, conditioners, bladders, screws, etc
- Through the use of SAP.
- Worked with supervisors and team members to understand supply needs and bring levels within desired tolerances.
EPI technician
Texas Instruments
08.1992 - 09.2001
- Operate AMAT 7600, 7810 and Centura epi reactors
- Run material to spec with focus on low cycle time and quality
- Inspect and measure work using KLA Tencor and visual inspection station
- Interact with Process and Equipment engineering to resolve process issues efficiently and correctly
- Responsible for routine maintenance on epi reactors including quartz cleaning/changes, lamp replacement and jet and temperature adjustment to keep tools running in spec.
- Maintained a safe working environment by adhering to strict safety protocols and participating in regular safety meetings/training sessions related to the E&I field
Education
Associates in Electronic Engineering Technology - Electronic Engineering Technology
ITT Technical Institute Garland
Garland, TX 01.1990 - 05.1992
Skills
5S
Safety awareness
Problem solving ability
Equipment Repair
Facilities Maintenance
Troubleshooting skills
Mechanical Repair
Preventive Maintenance
Tool management
Mechanical Troubleshooting
Parts Replacement
Additional Information
Skills, Self starter, team player, very reliable, I work well with little supervision, great communication, very familiar with semiconductor processing techniques, experience using pods or open cassettes, experienced using most all hand tools, I have a general background in mechanics and electronics.
Personal Information
Work Permit: Authorized to work in the US for any employer
Timeline
Metrology Equipment Engineering Technician
Texas Instruments
11.2014 - 02.2022
Lead CMP STO Manufacturing Specialist
Texas Instruments
09.2001 - 11.2014
EPI technician
Texas Instruments
08.1992 - 09.2001
Associates in Electronic Engineering Technology - Electronic Engineering Technology
ITT Technical Institute Garland
01.1990 - 05.1992
Facilities and Maintenance Technician III
Reactive Technologies Epi
2 2022 - Current
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