Summary
Overview
Work History
Education
Skills
Affiliations
Certification
Accomplishments
Patents
Timeline
Generic

Seung Ho Park

San Jose,CA

Summary

Dynamic Technical Director with established success at Lam Research, honored with customer appreciation award for outstanding contributions. Expertise in RIE and selective etch processes, coupled with robust project management and interpersonal skills, fosters innovative solutions in semiconductor technology, elevating product performance and client satisfaction.

Overview

22
22
years of professional experience
1
1
Certification

Work History

Technical Director, Leap Reviewer, Customer Technology Management

Lam Research
Fremont, CA
11.2016 - Current
  • Achieved customer appreciation award from SEC Foundry in 2022 for exceptional contributions.
  • Delivered commercial product for selective silicon removal in FinFET and GAA applications.
  • Executed first DRAM penetration with doped silicon hard mask removal techniques.
  • Introduced vapor oxide etch product for GAA oxide removal, enhancing overall performance.
  • Demonstrated ALE product capabilities for applications involving high aspect ratio structures.
  • Conducted technical needs assessments to define critical client requirements and solutions.
  • Directed processes and product development for various technology management projects.

Senior Member of Technical Staff, Manager

Applied Materials
Santa Clara, CA
06.2011 - 11.2016
  • Analyzed engineering requirements, technology, resources, and customer demands to assess project feasibility.
  • Recommended optimal designs to clients by outlining distinct benefits.
  • Managed C/F projects to develop innovative solutions for High Value Problems.
  • Collaborated on C/F chemistry and ESC/CCP hardware projects with RIE group.
  • Developed selective SiN spacer removal processes for Intel FinFET production line.
  • Created low and high temperature oxide removal processes for enhanced efficiency.
  • Explored new concepts for cleaning bottom metal contacts in DRAM and VNAND technologies.
  • Conducted research on emerging technologies to enhance product quality and operational efficiency.

Senior Member of Technical Staff, Manager

Evergreen Solar, Inc.
Marlborough, MA
11.2008 - 04.2011
  • Supervised material properties and quality improvement projects to enhance solar cell efficiency.
  • Established qualification processes and specifications for hot zone materials, including graphite and silicon feedstock.
  • Developed graphite purification methods, resulting in a 0.17% increase in cell efficiency.
  • Conducted thermal modeling using STR software to define modifications in hot zone design.
  • Invented defect mapping methodologies utilizing PL mapping, X-ray topography, carrier lifetime analysis, and dislocation measurement.
  • Standardized industry practices for SIMS, FTIR, GDMS, and ICPMS of silicon and graphite materials.
  • Achieved dislocation reduction from 6E5 to 1E5/cm2 through boron and germanium co-doping on silicon feedstock, improving solar cell efficiency by 0.1%.
  • Increased yield of string ribbon silicon growth from 90% to 96% by optimizing growth rates and cooling profiles.

Lead Crystal Growth Specialist, Line Manager

DOW Corning Corp.
Midland, MI
10.2003 - 11.2008
  • Product process liner manager
  • Solid Source (Si, C) Process liner manager
  • Improved wafer yields by oxidation and thermal design (50 % to 85%)
  • Direct SiC growth from powder source by PVT reactor (US and Europe patent)
  • SiC epilayer growth for p-i-n diode by MOCVD
  • Develop method to mapping Micropipe using scanning image with Photoshop and Image J (Industry Standard for SiC) and Quantitative method of Birefringence defect in SiC using polarizer (co-develop with NREL)
  • Process Development
  • RF induced PVT Reactor Design with flat coil
  • Nondestructive Device Yield prediction method development by Laser Surface Scanning
  • InGaN/GaN LED device process development with Northrup Grumman
  • Carbonization on Silicon by CVD
  • KOH warm etching for characterization and Cl2-RIE etching for fabrication
  • Performed quality assurance testing on newly developed software applications.
  • Developed and implemented specialized procedures for customer service operations.

Education

Ph.D. - Material Science

UC Berkeley As Exchange Student By Dongguk Univ.
Berkeley, CA
05-2003

Skills

  • RIE and selective etch
  • Crystal growth technology
  • Design of experiments (DOE)
  • Statistical analysis
  • JMP and Minitab
  • Project management
  • Interpersonal skills
  • Semiconductor device structure knowledge
  • Multi-tasking
  • Reaction mechanism modeling
  • Process development
  • Technical analysis
  • Product development
  • Client relationship management
  • Team leadership
  • Effective communication
  • Strategic planning
  • Problem solving
  • Customer feedback integration
  • Technology assessment

Affiliations

  • Association of Semiconductor Equipment Engineers
  • Plasma Application Group
  • Dow Corning Alumni

Certification

  • Six Sigma Green Belt, 2006
  • Certified Quality Education, 2008, Dow Corning

Accomplishments

  • Supervised project production efforts to ensure projects were completed to company standards, on time, customer’s demand and within budget constraints.
  • Gained customers' trust by being honest and sincere.
  • Coordinated with different departments to decide upon particular strategies and engineering specifications for a project and ensure smooth execution of the same.

Patents

  • Publication number: 20140166617
  • Publication number: CN104620363
  • Publication number: 2015-528647
  • Publication number: 10-2015-00566607
  • Publication number: WO14/042843
  • Publication number: 201426855
  • Publication number: US-2014-0080309-A1
  • Publication number: US-02015-0249018-A1
  • Publication number: 201419402
  • Patent number: 9023734
  • Publication number: US-2015-0235863-A1
  • Publication number: 201430944
  • Patent number: 9111877
  • Publication number: 201430946
  • Patent number: 8921234
  • Publication number: US-2015-0118857-A1
  • Patent number: 8951429
  • Publication number: US-2015-0262829
  • Patent number: 8765091
  • Publication number: 20120114545
  • Patent number: EP2245217
  • Publication number: 20020096674

Timeline

Technical Director, Leap Reviewer, Customer Technology Management

Lam Research
11.2016 - Current

Senior Member of Technical Staff, Manager

Applied Materials
06.2011 - 11.2016

Senior Member of Technical Staff, Manager

Evergreen Solar, Inc.
11.2008 - 04.2011

Lead Crystal Growth Specialist, Line Manager

DOW Corning Corp.
10.2003 - 11.2008

Ph.D. - Material Science

UC Berkeley As Exchange Student By Dongguk Univ.

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