Sucharitha Kasinadhuni
Chantilly,VA
Summary
- Process Owner for Diffussion processes: TEOS, ALD, Gate Oxide, Anneal, HTO, Nitride, Poly, LPRO, and Cure
- Hands on experience & understanding of both TEL and KOKUSAI tool sets
- Experience in troubleshooting equipment and process issues using E3 FD
- Excellent understanding of statistical process control (SPC) concepts and Design of Experiments (DOE)
- Diffusion area champion for Statistical Process Control
- Experience in project management and ability to work in a multicultural environment
- TPM core team lead for TEOS Cure
- Research experience in fabrication of micro fluidic channels, thin film deposition & characterization
- Knowledge of building ECAPs in eCAP (Camline software)
Overview
19
19
years of professional experience
Work History
Process Owner
Micron Technology
06.2015 - Current
Productivity Engineer
Micron Technology
07.2012 - 06.2015
Lead Engineer
Micron Technology
01.2010 - 07.2012
Process Engineer
Micron Technology
09.2008 - 01.2010
Graduate Assistant
University of Arkansas
08.2007 - 05.2007
Teaching Assistant
University of Arkansas
05.2006 - 12.2006
Education
Master of Science - Micro Electronics & Photonics
University of Arkansas
Fayetteville, AR05.2008
Bachelors of Technology - Mechatronics, Emphasis in Robotics and Automation
Jawaharlal Nehru Technological University
05.2005
Skills
- Design of Experiments (MES system)
- Data analysis ( JMP )
- Process improvement (TPM methodology)
- Project management
- Statistical Process Control - ( Camline ECAP software )
- 8D problem solving
Projects And Skills
- Auto cross qual/InteIIiquaI in TEOS workstation, Cross qual matrix developed to tune all the processes in TEOS from a single tuned in process. Enabling R2R to use the existing matrix to auto cross qual processes, that have not run in last 21 days. This project enabled reduction in QUAL_RUN time, and increase in availability by 2%.
- Roughened narrow liner conversion in TEOS workstation, Roughening of quartz surface, through a chemical treatment, increases the surface area. Increased surface area helps in better adhesion of deposited film. Improved adhesion reduces particles that may be caused due to peeling of TEOS. This project enabled up to 4 DPW yield gain on certain levels.
- SiC boat conversion in Anneal, Project helped resolve Furnace Post oxidation Anneal (FPOA) registration issues, which was number one in the pareto for yield issues. Supported initial installation and qualification of SiC boats in anneal. SWR design and execution to qualify one of the anneal steps on SiC boats.
- Smart Qual Project, Data collection and analysis to pre-adjust recipes post major PMs on nitride WS. Developed pre-adjustment calculator. Working with change control and MES to automatically start 'smart qual' which is a modified WAP QD post tube changes in nitride WS.
- HTP-2.0, Helped in development and deployment of HTP-2.0. Worked with vendor and Process Owner to resolve HTP abort issues. Co-ordinated with change control to set up MTSPC charts.
- Master's research project, Fabricated and tested a MEMS based device that can be used for manipulation of micron scale biological particles. Device fabrication involved deposition of thin films — copper, amorphous silicon and Polydimethylsiloxane (PDMS) layer on a glass substrate.
Awards
- FDC Good Catch Award, Awarded Good Catch at I ITV for identifying and troubleshooting clogged gas lines.
- Research Efficiency Award, Awarded the Monthly Research Efficiency award (MRE) in Micro EP for good research planning using the Microsoft Project tool.
Coursework
- Integrated Circuit Fabrication Technology
- IC Fabrication Laboratory
- Industrial Electronics
- Instrumentation and Control Systems
Timeline
Process Owner
Micron Technology
06.2015 - Current
Productivity Engineer
Micron Technology
07.2012 - 06.2015
Lead Engineer
Micron Technology
01.2010 - 07.2012
Process Engineer
Micron Technology
09.2008 - 01.2010
Graduate Assistant
University of Arkansas
08.2007 - 05.2007
Teaching Assistant
University of Arkansas
05.2006 - 12.2006
Bachelors of Technology - Mechatronics, Emphasis in Robotics and Automation
Jawaharlal Nehru Technological University
Master of Science - Micro Electronics & Photonics
University of Arkansas
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