Victor Wang
Summary
Methodical engineer with an aptitude for thin film process development and implementing solutions to drive project success. Proven track record in qualifying first-of-a-kind tool on customer site and developing processes with competitive specs to enable novel integration schemes in the semiconductor industry.
Overview
7
7
years of professional experience
Work History
Senior Process Engineer I
ASM
10.2023 - Current
- Drove cross-functional team with SW, HW, and product support to develop, troubleshoot, and qualify a First-of-a-Kind (FOK) tool in customer clean-room fab.
- Developed critical metal thin film processes on a FOK tool to enable novel integration schemes for customer's cutting edge device architectures.
- Implemented novel characterization method to evaluate process integration performance on customer structures with quick turn-around time.
- Led failure analysis by designing experiments and characterizing thin films to troubleshoot process module and meet competitive specs.
Semiconductor Research Corporation (SRC) Research Scholar
Kummel Group (University of California, San Diego)
11.2017 - 10.2023
- ALD thin film process development of Ru metal with record low resistivity (6.4 µΩ-cm) to support pathfinding for BEOL interconnect materials.
- Developed process to deposit selective Co metal thin films and achieved selectivity of >1000:1 on metals vs insulators for chiplet-to-chiplet bonding.
- Developed novel deposition schemes to solve integration challenges in collaborator structures.
- Built, automated, and maintained a cluster ALD tool enabled with an Auger Electron Spectroscopy chamber for in-situ characterization.
Education
Ph.D. - Material Science And Engineering
University of California, San Diego
La Jolla, CA10-2023
Master of Science - ECE-Applied Physics Devices And Materials
University of California, San Diego
La Jolla, CA06-2019
Bachelor of Science in Engineering - Electrical Engineering
Walla Walla University
College Place, WA06-2017
Skills
JMP
JSL
Python
Arduino
X-ray Photoelectron Spectroscopy
Scanning Electron Microscopy
4 Point Probe
Atomic Force Microscopy
Thin Film Process Development
SPC
Timeline
Senior Process Engineer I
ASM
10.2023 - Current
Semiconductor Research Corporation (SRC) Research Scholar
Kummel Group (University of California, San Diego)
11.2017 - 10.2023
Ph.D. - Material Science And Engineering
University of California, San Diego
Master of Science - ECE-Applied Physics Devices And Materials
University of California, San Diego
Bachelor of Science in Engineering - Electrical Engineering
Walla Walla University
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