Summary
Overview
Work History
Education
Skills
Publications
Projects
Graduate Courses
Personal Information
Timeline
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RAJ KISHOR PATIL

San Diego,USA

Summary

Optical Systems Engineer with expertise in high‑power CO₂ and EUV laser systems, optical metrology, LIDT testing and DUV Raman microscopy. Skilled in troubleshooting, beam optimization, detector characterization, and MATLAB /Zemax analysis. Experienced in developing optical setups, enhancing system reliability, and solving complex laser–plasma and contamination issues.

Overview

14
14
years of professional experience

Work History

Senior Optical Sensing Engineer

ASML US LP
11.2018 - Current
  • Planning, installation, integration, and testing of 1um lasers, metrology and controls for next generation high power EUV systems to support volume production of sub-2 nm Logic nodes and leading-edge DRAM nodes.
  • Investigation and mitigation of impact of straylight and glint on beam metrology metrics.
  • Designed optical test setup for laser induced damage threshold testing of optical coatings with high power pulsed CO2 laser (250W,50kHz) to measure the damage threshold & prevent coating failure to prevent unscheduled long downtimes on customer sites.
  • Investigated and qualified calibration stability, noise sources, thermal stability, small signal laser gain effect, and alignment sensitivity of photoelectromagnetic IR detectors operated in saturation mode for product release.
  • Installation, integration and testing of deformable mirror to optimize beam size resulting in longer laser lifetime.
  • Troubleshot seed laser module (50kHz,10W) for single mode operation, temporal, and spatial stability to optimize beam quality to maximize the output power of the system.
  • Performed root cause failure analysis of high-power CO2 laser systems for power loss and degradation, high reflected power, beam caustic changes, and pointing-position alignment changes of laser beam.
  • MATLAB code development for optical beam propagation, phase extraction, beam quality analysis, laser performance monitoring, and waveform analysis.

System Performance Engineer

ASML US LP
08.2016 - 11.2018
  • Served as an expert in system level performance, laser light generation and amplification, laser-plasma interaction, debris mitigation, and controls.
  • Developed software tool in MATLAB for analysis of long-term temporal and spectral behavior of signals from the optical metrology sub-systems to extract correlations and trends to optimize the EUV performance.
  • Proposed and qualified solutions to reduce homogenous and localized contamination of EUV collection optics to increase wafer per hour yield.
  • Firsthand troubleshooting of factory and onsite customer EUV system issues caused by laser-plasma-flow-tin droplets interactions to reduce unscheduled downtimes and improved availability.

Graduate Research Assistant

College of Optical Sciences, University of Arizona
01.2015 - 05.2015
  • Built an imaging microscope with DUV excitation using second harmonic generation from fiber laser for Raman spectroscopy and achieved suppression of fluorescence in Raman spectrum for biomolecules.

National Photonics Fellow

Tata Institute of Fundamental Research
07.2012 - 07.2013
  • Fabrication of meta-material pattern on gold surface to demonstrate polarization dependent switching between visible and NIR wavelengths leading to two journal paper publications.
  • Nanofabrication in Class 1000 cleanroom which included deposition of various materials, optimizing the Ebeam resist coating process, optimizing Ebeam Lithography and CAD design parameters.
  • ICP-RIE etching, analysis of fabricated structures using AFM, FTP & SEM imaging and setting up experiments to characterize the fabricated structures.
  • FOTON Lab, INDIA

Education

Masters - Optical Sciences

College of Optical Sciences, University of Arizona
Tucson, USA
05.2016

Bachelor of Engineering - Electronics and Telecommunication

University of Pune
Pune, India
07.2011

Skills

  • Functional and system testing
  • Laser induced damage threshold testing
  • MATLAB optical beam propagation
  • ZEMAX gaussian beam propagation analysis
  • ZEMAX sequential design aberration analysis
  • High power laser alignment
  • Beam quality and power loss troubleshooting
  • Raman Spectroscopy and Microscopy
  • MATLAB data analysis and visualization
  • LABVIEW data acquisition and analysis
  • Cleanroom nanofabrication
  • Electron beam lithography

Publications

  • Raj Patil, Sheng Lan and Achanta Venu Gopal, Fabrication of large-area two-dimensional array of air holes with different hole shapes for optical and terahertz wavelength regions., J. Nanophoton., 8, 1, 083896, 2014, 10.1117/1.JNP.8.083896
  • P. Mandal, S. Anantha Ramakrishna, Raj Patil and Achanta Venu Gopal, Polarization dependent color switching by extra-ordinary transmission in H-slit plasmonic metasurface., J. Appl. Phys., 114, 224303, 2013, http://dx.doi.org/10.1063/1.4842115
  • Modak S, Patil A, Patil R, et al., Silicon Based Taper Waveguides for Near Field Coupling., IEEE Photonics Conference (IEEE PHO 2011), 10/11, Arlington, Virginia, USA, Proc. IEEE Photonics Conference, 463 – 464
  • Modak S, Patil A, Patil R, et al., Metal Nanoparticle Chains as Light Couplers., International Conference on Nanoscience, Technology and Societal Implications (IEEE NSTSI 11), 12/11, Bhubaneshwar, India, Proc. IEEE NSTSI11, 1-5

Projects

  • Design test setup for Laser induced damage threshold testing of optical devices and coatings, The setup was optimized in Zemax and assembled for high power pulsed CO2 laser (250 W, 50KHz, 50ns) to determine the damage mechanism, damage threshold & safe operating conditions of optical devices and coatings. Mode matching and beam caustic optimization was performed for different parameters of pulse energy, repetition rate, pulse length, wavelength, fluence and operating temperature. The metrology setup measured shot to shot reflection and transmission pulses with PEMs to detect exact moment of damage and built thermal modelling of damage mechanism. A precise control over the z focus with relay range of 1.3 mm was accomplished using combination of a Nanoscan and a fast-focusing microscope.
  • Built a DUV Raman imaging microscope, Designed and integrated a spectrometer with CCD, XYZ motion stage and DUV source (second harmonic generation from fiber laser) with help of necessary optics. Developed programs in LABVIEW to scan in XYZ axis for 3D imaging, to autofocus on the sample to get optimum output, to store 3D cube data, to analyze the recorded 3D cube data and to identify individual elements from a mixed Raman signal.
  • Fabrication of H shaped meta-material pattern on gold surface, The fabricated pattern was used to switch the wavelength of transmitted light from visible to near infrared by changing the polarization of the incident light. Experimental measurements were done on the above fabricated structure and the results fairly agreed with the theoretical results.
  • Senior Year Project on Design and Fabrication of Waveguide and Interconnects using Plasmonics, Studied the coupling of light in metal Nano-particle chains based on the phenomenon of Surface Plasmon Resonance. These Nano-particle chains acted as interconnects. Designed an optimized taper waveguide for coupling of light from source on to Nano particles chain. The project was designed and simulated in OPTIFDTD software.

Graduate Courses

  • Optical Physics and Lasers (OPTI 511R)
  • Nonlinear Photonics (OPTI 553)
  • Introduction to Optical Spectroscopy (OPTI 568)
  • Lens Design (OPTI 517)
  • Optical Design and Instrumentation (OPTI 502)
  • Electromagnetic Waves (OPTI 501)

Personal Information

Citizenship: India

Timeline

Senior Optical Sensing Engineer

ASML US LP
11.2018 - Current

System Performance Engineer

ASML US LP
08.2016 - 11.2018

Graduate Research Assistant

College of Optical Sciences, University of Arizona
01.2015 - 05.2015

National Photonics Fellow

Tata Institute of Fundamental Research
07.2012 - 07.2013

Masters - Optical Sciences

College of Optical Sciences, University of Arizona

Bachelor of Engineering - Electronics and Telecommunication

University of Pune
RAJ KISHOR PATIL